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heat treatment furnace / oxidation / cabinet / electric
VF-5700 Koyo Thermos Systems



  • Function:

    heat treatment, oxidation

  • Configuration:


  • Heat source:


  • Other characteristics:

    for aeronautical applications


This heat treatment system performs silicon wafer, IGBT, polyimide and thin wafer oxidation, diffusion and CVD. Since its height is less than 3000 mm, this model can be easily introduced. It features a short cycle time and high throughput.

Mini batch, flexible 25 to 50 wafers batch processing
High throughput using a high-power heater with fast heat-up time
Equipped with an operator-friendly high performance control system
Compact size without stocker