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annealing furnace / cabinet / electric / controlled atmosphere
VF-3000H Koyo Thermos Systems



  • Function:


  • Configuration:


  • Heat source:


  • Atmosphere:

    controlled atmosphere

  • Other characteristics:

    high-temperature, automatic, vertical

  • Maximum temperature:

    Min.: 700 °C (1,292 °F)

    Max.: 1,850 °C (3,362 °F)


A vertical furnace enabling ultra high-temperature processing, ideal for power device manufacturing. Supports 3- to 6-inch wafers and has an automatic wafer transfer mechanism. Can be used for applications ranging from R&D to mass production.

Supports lot sizes ranging from mini-batches to 50 wafers, and applications ranging from R&D to use on mass-production lines.
Supports a wide range of wafer sizes from 3 to 6 inches.
The furnace interior features our proprietary metal-free construction.
Enables temperature monitoring in wafer vicinity.
An N2 load lock is provided as a standard feature.
High-throughput cassette-to-cassette transport
H2 atmosphere annealing with trench rounding is available as an option.