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steel annealing / large series
RLA-3100-V Koyo Thermos Systems

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steel annealing / large series steel annealing / large series - RLA-3100-V
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Characteristics

  • Material:

    steel

  • Production method:

    large series

Description

Enables contact annealing and GaN substrate processing. Supports 6-inch wafers and enables activation and oxidation in vacuum (LP) environments/N2 load-lock atmospheres.
Features

Maximum operating temperature: 1,200°C
Supports a wide range of wafer sizes up to 6 inches.
An automatic wafer replacement mechanism provides cassette-to-cassette transfer.
Vacuum support improves annealing characteristics.
N2 load-lock support enables rapid turnaround time.
Can process GaN substrates.