PVD deposition machine PVD 75

sputteringthermal evaporationvacuum

PRO Line PVD Series – Versatile Sputtering, Electron Beam, Thermal, & Organic Evaporation Deposition Platform The PRO Line PVD Series utilizes a modular design configurable for a variety of thin film deposition applications. Available in three increasing chamber sizes: PVD75, PVD200, and PVD500 Available with TORUS® Mag Keeper™ UHV Compatible Circular Magnetron Sputtering Sources in 2", 3", 4" diameters Available with TORUS® Linear Magnetrons Available with Multi-pocket electron beam evaporation sources Available with multiple thermal evaporation source configurations Up to two organic evaporation sources available Multi-technique options available. Examples: Electron beam + Sputtering, Electron beam + evaporation Wet or dry rough pumping, turbo pump, or cryogenic pump high vacuum pumping options available Standard configurations compatible with up to 11" to 20" OD substrates (pending chamber size); up to 850°C heating, cooling, and biasing options available Single and multi-wafer load lock options available for substrates up to 6" PRO Line series of PVD tools include KJLC's innovative eKLipse™ advanced control package