Microwave reactor
DiamoTek 700
LAMBDA Technologies
2.45 GHz at 1.8kw- 10kw power
5 inch discharge diameter_
3-4 inch deposition area
1-10 microns /hr depo rate
20 - 300 torr process conditions
Options include:
- Turbo pump
- Additional MFC
-Emission Spectrometer-
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