Full automatic magnetron sputtering PVD deposition machine
max. 1 min | DYNALINE
Leybold Optics
The DynaLine is a fully automated modular inline sputtering machine with the highest productivity for the automotive industry.
The machine can be integrated into fully automated conveyor systems and can be customized to specific configurations due to the modular concept of the machine. Substrates are loaded to a carrier and will be processed sequently by static deposition processes.
Backbone of the system are the Magnetron Sputter deposition with IPT (Inter Pole Targets) for the highrate deposition of Metals and the advanced MF (Mid Frequency) PECVD (Plasma Enhanced Chemical Vapor Deposition) for the deposition of Siloxane top-coat.
High efficient pumping systems, a robust carrier drive and precise vacuum lock systems are a further characteristic of the machine.
Features DynaLine:
COATING TECHNOLOGY
* DC Magnetron sputtering of Metals
(Al, Ti, Cr,...) with IPT cathodes
* MF (40 MHz) PECVD
SYSTEM CHARACTERISTIC
* Vertical arrangement
* Load-lock-type inline system
* Substrate carrier configuration with capability of integration into full automated conveyor system
* Flexible system configuration due to modular concept of the machine
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