PVD deposition machine SYRUSpro series

ion beam-assistedthin-filmfor optoelectronics

The SYRUSpro series by Bühler Leybold Optics is an industry leading platform in volume production with high accuracy and high yield levels of optical coatings for precision optics. SYRUSpro coaters are ideal for applications from deep ultraviolet (DUV) via visible spectrum (VIS) up to infrared (IR) spectral range. The variety of coatings covers edge filters (short and long pass), UV–IR cut filters, notch filters and narrow band-pass filters, dichroic color filters and polarization beam splitters, AR and HR coatings for lasers and many more. Every SYRUSpro is equipped to the customer’s requirements with a large number of Bühler Leybold Optics proprietary and standardized components. This allows simple updating to match increasing process requirements. In addition, Bühler Leybold Optics’ cutting-edge process control system unites high programming flexibility with maximum levels of automation. All of these attributes combine to deliver very precise, high yield and high throughput figures for the uninterrupted 24/7 volume production of optical filters. Different chamber sizes for maximum flexibility SYRUSpro coaters are available in eight different chamber sizes with inner diameters of between 710 mm and 2810 mm. This means we can offer a corresponding chamber to perfectly match the loading capacities and substrate sizes defined by our customers. As an example, our 1950-mm or 2810-mm chambers are ideal platforms for extreme substrate sizes.