Dry piston vacuum pump Leybold

The EcoDry M incorporates a dry sliding mechanism without the need for oil or hydrocarbons.
Through the further developed and optimised compression processes, the EcoDry M 15/30 attains with three compression stages a base pressure (total) in the low 10-2 mbar range.
Since the EcoDry M 15/20/30 may be operated either vertically (as normally delivered) or horizontally, this pump is highly flexible when it has to be integrated into the customer’s system.

Advantages to the User

Low maintenance, free of oil and bearing lubrication, free of hydrocarbons
Extremely low particle emissions on the intake and exhaust sides
Rugged and most reliable
Low power consumption
Service friendly
Air cooling
Plug & play
Good pumping speed at low base pressure
High water vapour tolerance (gas ballast standard)
No grease lubricated bearings in the vacuum section
Leak tight
Compact size
Runs at 1000/1200 rpm (50/60 Hz mains)
Rugged full cross section exhaust valves
For both horizontal and vertical operation

Typical Applications

Applications in physics
Loadlock chambers
Transfer chambers
Mass spectrometers
Electron microscopes
Lighting
Thinfilm coaters
Freeze drying
Forevacuum pump for dry high-vacuum systems
Pumping of oxygen concentrations over 21 percent by volume upon request

More specifications...