Precise XY positioning table with linear motor and optical aperture
310 x 310 mm | DL S
LPKF Laser & Electronics
Technical data:
Range of motion:310 x 310 mm
Absolute accuracy:+/- 1 µm
Max. velocity: 600 mm/s
usable acceleration X-axis:10 m/s2
usable acceleration Y-axle:5 m/s2
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