LPKF
Group: lpkf

Linear motor driven XY positioning stage
max. 250 x 250 mm, max 300 mm/s LPKF

The LPKF XY 25/25 GL Cross Table is a precision positioning system with a monolithic granite sub-structure. Each of the two axes is driven by a linear motor, equipped with two precision guides, and has a high resolution linear scale with an exact reference point. The combination of a linear motor and precision guides enables highly-dynamic solutions to be implemented in a very compact design for the mid-sized traversing range.

Application
The LPKF XY 25/25 GL has been specially developed for use in the chip industry. It positions wafers or other flat structures very quickly and extremely precisely under the measuring instruments used. This includes applications such as:
* Wafer bumpers
* Wafer samples
* Optical wafer inspection systems
* Precise 3D wafer measuring systems
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standListOtherProduct www di En 2012-06-22-01