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Positioning systemLPKF DL30/30 S
Precision-Cross Table with manufacturer of linear motors and 100 mm optical aperture Technical data: Range of motion: 310 x 310 mm Absolute accuracy: +/- 1 µm Max. velocity: 600 mm/s usable acceleration X-axis: 10 m/s2 usable acceleration Y-axle: 5 m/s2 |
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