Positioning system LPKFLPKF DL30/30 S
Precision-Cross Table with linear motors and 100 mm optical aperture
Technical data:
Range of motion: 310 x 310 mm
Absolute accuracy: +/- 1 µm
Max. velocity: 600 mm/s
usable acceleration X-axis: 10 m/s2
usable acceleration Y-axle: 5 m/s2
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