Precision linear and rotary positioning stage
LPKF Z-φ 2/20, LPKF Z-φ 2/190 Series
LPKF
Range of motion 20 mm, +/- 10°
The LPKF Z-φ 2/20 lifting and rotating unit has been specially developed for the extremely fast and precise positioning of wafers in chip industry facilities. Its very small, light and compact design also makes it suitable for mounting on LPKF cross tables. In combination with the 3D corrective algorithm developed by LPKF, Z-errors of the overall system can be corrected. LPKF can also offer vacuum chucks as an option. The LPKF Z-φ 2/190 lifting rotary unit can be used for larger turning ranges (+/- 95°).
Compact 2-axis driving system for lifting and rotating
Bewegungsbereich 20 mm, +/- 190°
The lift and rotating unit LPKF Z-φ 2/190 was developed especially for extremely fast and precise positioning of wafers in equipments for the chip industry. Due to the small and compact construction it is also capable for assembly in LPKF cross tables. In combination with the 3D correction algorithm, developed by LPKF, Z-failures of the complete system are compensable. Vacuum chucks can be optional offered by LPKF.
The LPKF Z-φ 2/190 lifting rotary unit can be used for smaller turning ranges (+/-10°).
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