temperature monitoring module / process / robust / Modbus
LUXTRON m920 Series
robust, Modbus, multi-channel
Luxtron m920 Series Semiconductor OEM Module
High Performance for Advanced Technology Applications
The m924 (4channel) and m922 (2channel) Semiconductor OEM modules are the newest Luxtron products for Etcher and Wafer Fab equipment temperature monitoring of Electrostatic Chucks, Chambers and other devices. The m920 Series modules are high performance solutions that are flexible, reliable and cost effective.
New High Performance Fiber Optic Temperature Sensing solution based on Field Proven Reliability and Experienced Technical Application Support
The m920 Series Semiconductor OEM module and LumaSense custom probes are designed to allow complete mix and match of components. Any m920 Series module can be used with any probe on any channel without calibration. The m920 Series has built in calibration tables matched to the custom LumaSense probes for high accuracy measurements.
Easy Integration into OEM Equipment
The m920 Series consist of two boards. The Main Board contains fiber optic temperature sensing channels, digital output (RS-232 ASCII, RS-485 Modbus), and power connection. The Analog Output board provides 0 to 10V or 4 to 20mA output, and is mounted above the Main Board. An enclosure is available.
The m920 Series Main Board conditions the measurement signal from Fluoroptic® probes and reports a calibrated temperature to the OEM control system. The custom non-metallic probe sensors are safe in the harsh environments and connect to the m920 Main Board via robust fiber optics.
LumaSense Technologies has a long history of designing reliable probes for the most demanding fiber optic temperature measurement applications.