Optical incremental linear encoder
± 0.1 µm | BS78
Magnescale Europe GmbH
High-speed and high-resolution, while maintaining stable, ultraprecision measuring. Ideal for precision stages, semiconductor inspection/manufacturing systems, and ultraprecision processing machines.
* High-resolution scale with signal wavelength of approx138nm, outperforming light wave interferometer systems
* High stability, unaffected by humidity, air pressure and air disturbances
* Reference point accuracy : ±0.1μm
* Scale accuracy : ±0.04μm or better (measuring length : 40 mm)
* Completely non-contact design Return error is virtually eliminated.
* Special non-magnetic and vacuum-compatible models available
* Using low expansion glass : -0.7 x 10-6/ ℃ (measuring length : 10 to 420 mm)
* High-resolution scale with signal wavelength of approx138nm, outperforming light wave interferometer systems
* High stability, unaffected by humidity, air pressure and air disturbances
* Reference point accuracy : ±0.1μm
* Scale accuracy : ±0.04μm or better (measuring length : 40 mm)
* Completely non-contact design Return error is virtually eliminated.
* Special non-magnetic and vacuum-compatible models available
* Using low expansion glass : -0.7 x 10-6/ ℃ (measuring length : 10 to 420 mm)
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