X-ray diffractometer / high-resolution
X'Pert MRD / XL
The long and successful history of PANalytical’s Materials Research Diffractometers (MRD) continues with a new generation – X’Pert³ MRD and X’Pert³ MRD XL. The improved performance and reliability of the new platform have added more analytical capability and power for X-ray scattering studies in:
•advanced materials science
•scientific and industrial thin film technology
•metrological characterization in semiconductor process development
Both systems handle the same wide range of applications with full wafer mapping up to 100 mm (X’Pert³ MRD) or 200 mm (X’Pert³ MRD XL).