XY positioning system / rotary / laser / vacuum
Wafer Ion-implanting Materials Research Furnaces, Inc.

Characteristics

  • Number of axes:

    XY

  • Features:

    rotary, laser

  • Applications:

    vacuum, for the semiconductor industry

  • Other characteristics:

    servo controlled

Description

General Specifications:

1 hot zone station- 7 cool statoins
1100oC in vacuum atmosphere
High precision DC power supply
Servo controlled motion
Large rear access port
Large loading door
Evacuation and inert gas system

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