XY positioning system / rotary / laser / vacuum
Wafer Ion-implanting Materials Research Furnaces, Inc.



  • Number of axes:


  • Features:

    rotary, laser

  • Applications:

    vacuum, for the semiconductor industry

  • Other characteristics:

    servo controlled


General Specifications:

1 hot zone station- 7 cool statoins
1100oC in vacuum atmosphere
High precision DC power supply
Servo controlled motion
Large rear access port
Large loading door
Evacuation and inert gas system