Turbine flow sensor
U708 UHP McMillan

McMillan Model U708 UHP FLO-SENSORS will precisely measure flow rates of virtually any fluid as low as 15 mL/minute or as high as 10 L/minute. Repeatable results are achieved by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no particle generation. PTFE, perfluoroelastomers, and sapphire wetted parts ensure compatibility with chemicals commonly found in microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.

These UHP FLO-SENSORS integrate the sensing element with advanced electronics to provide output signals proportional to flow rate. Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all FLO-SENSORS. A repeatability specification of ±0.2% full scale reassures process engineers of consistent results.

The Model U708 features a compact footprint-reducing design and an analog output.