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hygrometer

Pure gas dew-point hygrometer


In many high purity gas applications, such as the semiconductor industry, the residual moisture content of the gas is critical to satisfactory operation of a process. Historically trace moisture measurement has been a difficult exercise, demanding the use of complex moisture analysers or expensive analytical techniques. Now Michell has brought to market a simple, economical and very effective solution for on-line measurement of dew-point temperatures down to -120 °C (equivalent to less than 1 part per billion). The PURA transmitter benefits from Michell's experience and expertise in the production and calibration of impedance dew-point sensors. Incorporation of industry standard materials and manufacturing processes gives the first low cost transmitter suitable for large-scale integration into a semiconductor fabrication plant or high purity gas line.

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