6-axis parallel-kinematic hexapod micro-positioning system
± 30 µm, max. 150 kg | PAROS MICOS

Positioning and micro-positioning stages

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  Linear motor driven single-axis positioning stage
  1 000 mm, 0.1 µm, 500 mm/sec, max. 20 kg | LMS-100
  
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  Z stage
  0.05 µm, max. 6 mm/sec, max. 15 kg | UPL-120
  
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  Linear ball screw driven translation stage
  0.4 µm, max. 20 mm/sec, max. 5 kg | VT-80
  
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  High precision linear positioning stage
  0.035 µm, max. 100 mm/sec, max. 35 kg | UPM-160
  
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  Micro-pitch rotary positioner
  max. 1 170°/sec, max. 2 kg | DT-80 R
  
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  Piezo-positioner for precision machining
  
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  Micro-pitch positioning actuator
  0.3 µm, max. 10 mm/sec, 110 N | MP-20 B
  
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  Miniature linear positioner
  0.2 µm, max. 1 mm/sec, max. 0.8 kg | MT-55
  
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  Translation stage
  
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  Micro-positioning system
  max. 10 mm/sec | SF-3000 LS
  
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  Motorized rotary table with sub-micro-rad precision
  ± 3 μm, max. 360°/sec, max. 20 kg | UPR-120
  
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  Piezoelectric XY stage
  max. 1 kg | PPX-32
  
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  Piezoelectric rotary positioning stage
  360°, max. 1 kg | PR-32
  
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  XY positioning stage
  max. 4 kg | AKT-65