MICOS

Linear motor driven single-axis positioning stage
1 000 mm, 0.1 µm, 500 mm/sec, max. 20 kg | LMS-100 MICOS

Linear stages LMS-100 are driven by linear motors and are equipped with a linear scale. The very small height of 30 mm and the width of 100 mm allows very compact setups even for long travel ranges. All linear stages of the LMS-100 series are equipped with limit switches for protection against damage.
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