Motorized rotary table with sub-micro-rad precision MICOS

D E S C R I P T I O N
Ultra Precision Rotation Stages of the structural series UPR-100 and UPR-160 are employed for dynamical positioning. They are mainly utilized in the field of semiconductor technology, for positioning systems of laser treatment, automation systems and robotic. All Rotation Stages of the structural series UPR are directly driven by a torque motor. Mechanical transmissions become no longer necessary. So, with this better positioning accuracies, higher dynamic accelerations and speeds can be achieved as in case of conventional drive systems. Calibrated, paired angular ball bearings guarantee a high central load capacity without breakdown torque. UPR - Rotation Stages are equipped with angular scale. Resolutions up to 0.0002° are standard offered. The Ultra Precision Rotation Stages are equipped with a contactless limit switch.

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