Motorized rotary table with sub-micro-rad precision
± 3 μm, max. 360°/sec, max. 20 kg | UPR-120 MICOS

The UPR-120 ultra-precision rotation stage was developed for fast and accurate
positioning applications. This stage is mainly used in the field of semiconductor
technology, for positioning of laser treatment systems,
robotics and synchrotron applications. All rotation stages from the UPR series are directly driven by a torque motor, eliminating the need for mechanical transmissions. This results in better positioning accuracy, higher acceleration and speed. Calibrated cross roller bearings guarantee a high central load capacity without breakdown torque. The UPR-120 rotation stages are equipped with a high resolution angular scale and with a contactless limit switch.