Vacuum compatible linear stage
0.05 µm, max. 15 mm/sec, max. 7 kg | PLS-85 MICOS

The PLS-85 linear stages are especially suited for high precision applications with limited space conditions while allowing loads of up to 10 kg. Cross-roller bearings
guarantee very high guiding stiffness.
Driven by a precision re-circulating ball screw with 1 mm pitch options, the PLS-85 can be mounted in any orientation. For more demanding positioning tasks, the PLS-85 linear stages can be supplied with a side-mounted linear scale.
Drawing on the extensive experience of miCos GmbH in the field of precision positioning in both vacuum and cryogenic environments, the PLS-85 is available configured for either HV or UHV operation.
Special attention is paid to material choice, preparation, finish and selection of lubrication materials for moving parts. The basic stage is enhanced by detail design changes to minimise and where possible remove the potential for trapped volumes. Wiring is reconfigured with appropriate insulation materials and the highest quality vacuum prepared stepper motors are selected. Optional UHV compatible limit switches are available. Final test of the stages are carried out in the miCos GmbH vacuum facility. Bake-out and out-gassing specifications are available on request. [*] = HV / High Vacuum