Z stage
0.05 µm, max. 6 mm/sec, max. 15 kg | UPL-120 MICOS

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  Advanced multi-axis programmable motion control card
  

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  Vacuum compatible linear stage
  0.05 µm, max. 15 mm/sec, max. 7 kg | PLS-85
  

Positioning and micro-positioning stages

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  Micro-pitch positioning table
  0.05 µm, max. 90 mm/sec, max. 35 kg | HPS-170
  
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  Compact piezoelectric nano-positioning stage
  max. 1kg | PP-20
  
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  Low profile piezoelectric positioning stage
  52 mm, 0.025 µm, max. 10 mm/sec, max. 1 kg | LPS-65
  
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  Linear motor driven single-axis positioning stage
  1 000 mm, 0.1 µm, 500 mm/sec, max. 20 kg | LMS-100
  
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  Linear ball screw driven translation stage
  0.4 µm, max. 20 mm/sec, max. 5 kg | VT-80
  
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  High precision linear positioning stage
  0.035 µm, max. 100 mm/sec, max. 35 kg | UPM-160
  
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  Micro-pitch rotary positioner
  max. 1 170°/sec, max. 2 kg | DT-80 R
  
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  Piezo-positioner for precision machining
  
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  Micro-pitch positioning actuator
  0.3 µm, max. 10 mm/sec, 110 N | MP-20 B
  
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  6-axis parallel-kinematic hexapod micro-positioning system
  ± 30 µm, max. 150 kg | PAROS
  
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  Miniature linear positioner
  0.2 µm, max. 1 mm/sec, max. 0.8 kg | MT-55
  
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  Translation stage