The INNOVA series non-contact critical dimension measurement systems offer the most advanced solution for your CD metrology needs. INNOVA systems have found a multiplicity of uses in both field of view (FOV) and point to point (PTP) applications where non-contact measurement of the highest accuracy and repeatability are required. The INNOVA incorporates sound metrology principles in its design and construction, and combined with powerful image analysis algorithms provides exceptionally accurate measurements. FOV measurement accuracy is 0.01 mm (10nm); PTP XYZ measurement repeatability as low as 5nm 3s may be obtained with a 100X objective, depending on sample characteristics.