Confocal chromatic optical pens for profilometry, microtopography, roughness, auto-focus vibrometery, in-line inspection quality control, and thickness measurements.

The new modular design allows up to 30 different optical pen configurations for specific depth of field, spot size, working distance, object slope and photometric efficiency. Users can choose from a selection of five magnifiers, ranging from 3.3mm to 29mm focal lengths, and six different chromatic professional lenses, 130µm to 27mm depth of fields. Pens can achieve maximum axial resolution of 5nm, accuracy to 20nm and max slope to 87º for diffusive objects.