The Micronas mySENS gas sensing technology represents a new versatile integrated sensor technology based on a CCFET Sensor (CCFET = Capacitive Coupled Field Effect Transistor). This sensor technology aims at detection of concentration changes of selected gases in ambient environments in a broad variety of different applications. Its fabrication process is embedded into Micronas' CMOS manufacturing technology. Thus, the sensor can be integrated together with control and evaluation electronics into one single chip, profiting from both miniaturisation as well as design experience of current advanced semiconductor technology.
