Inspection microscope for semiconductors
FS70 MITUTOYO

FEATURES
* The optical system that was originally
developed for the best-selling FS60
models was further enhanced for the FS70
models. It is ideal as the microscope unit
of a prober station for semiconductors. (All
models CE marked.)
* The FS70L supports three types of YAG
laser wavelength ranges (1064nm, 532nm
and 355nm), while the FS70L4 supports
two types of wavelength ranges (532nm
and 266nm), thus expanding the scope of
laser applications, allowing laser-cutting
of thin-films used in semiconductors and
liquid crystal substrates. However, Mitutoyo
assumes no responsibility whatever for
the performance and/or safety of the laser
system used with Mitutoyo microscopes.
A careful examination is recommended in
selecting a laser-emission unit.
* Bright field, Differential Interference
Contrast (DIC) and polarized observations
are standard with the FS70Z. The FS70L
and FS70L4 do not support the DIC
method.
* By employing an inward turret, the long
working distance objectives provide
excellent operability.
* An ergonomic design with superb
operability: the FS70 employs the erectimage
optical system (the image in the
field of view has the same orientation as
the specimen) and enlarged fine focus
adjustment wheel with rubber grip coarseadjustment
knob.

Technical Data
Focus adjustment
* Method: With concentric coarse and fine
focusing wheels (right and left)
* Range: 50mm travel range
0.1mm/rev. for fine adjustment,
3.8mm/rev. for coarse adjustment
Trinocular tube Image: Erect image
Pupil distance: Siedentopf type,
adjustment range: 51 - 76mm
Field number: 24