MKS Instruments

Multi-function calibrator
MKS Instruments

Pressure and Flow Rate Calibration

Processes live or die by the repeatability of the process conditions. It is not enough that a particular tool perform in a consistent manner, run-to-run and day-to-day, but also multiple tools that are running the same process must run that process in the same manner and under the same conditions. From a vacuum and gas control standpoint, that means identical flows and pressures.
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