Air analyzer Process Sense™
elementalfor integrationNDIR

air analyzer
air analyzer
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Characteristics

Measured entity
air
Measured value
elemental
Configuration
for integration
Technology
NDIR

Description

The Process Sense™ is suitable for determining the completion of the plasma chamber cleaning, in semiconductor and deposition chambers. The pressure analyzer minimizes the chamber erosion, due to overcleaning. As a result, the life service of the chamber is extended. The device is designed from an infrared absorption, which is efficient for all plasma cleaning operations. It is offered in complete upgrade kits, for AMAT CVD tools. It can be utilized in different applications involving silicon oxides, silicon nitrides, polysilicon and in silane or TEOS processes.

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Exhibitions

Meet this supplier at the following exhibition(s):

ACHEMA 2024
ACHEMA 2024

10-14 Jun 2024 Frankfurt am Main (Germany)

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    *Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.