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NDIR elemental analyzer
Process Sense™ MKS Instruments

  • NDIR elemental analyzer Process Sense™ MKS Instruments
The Process Sense™ endpoint sensor is a small, low cost partial-pressure analyzer specifically designed to determine the completion of plasma chamber cleaning for both semiconductor and flat panel deposition chambers. Process Sense™ is based on infrared absorption, the only technique applicable to all (in-situ and remote) plasma cleaning processes.
Features & Benefits:

Fast response enables real-time chamber clean endpoint detection - lower Cost of Ownership,
Reduces chamber erosion from over cleaning - extending the life of the chamber,
Optimizing chamber clean time increases tool availability,
Reduced over-clean lowers particulate generation for improved yield,
Permanent calibration unaffected by process conditions,
Complete upgrade kits available for AMAT CVD tools.

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