thermal mass flow controller / for gas
IE50A MKS Instruments

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thermal mass flow controller / for gas thermal mass flow controller / for gas - IE50A


  • Technology:

    thermal mass

  • Fluid:

    for gas

  • Flow rate:

    Max.: 3,000 l/h (13 us gal/h)

    Min.: 0 l/h (0 us gal/h)

  • Pressure:

    150 psi


The IE50A Mass Flow Controller is a general purpose, elastomer-sealed MFC with flow control capability from 5 sccm to 50 slm Full Scale, N2 equivalent. It incorporates the latest in digital flow control electronics and a proven, patented thermal sensor and mechanical design.

The IE50A is a digitally-controlled MFC offered with analog (0 to 5 VDC or 4-20 mA) or a variety of digital (RS485, Profibus® and DeviceNet™) I/O. The digital control electronics utilize the latest in MKS control algorithms for fast and repeatable response to setpoint throughout the control range. Typical response times are on the order of 500 milliseconds. A digital calibration (included) yields 1% of setpoint accuracy on the calibration gas.