thermal mass flow controller / for gas
IE250A MKS Instruments

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thermal mass flow controller / for gas thermal mass flow controller / for gas - IE250A
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Characteristics

  • Technology:

    thermal mass

  • Fluid:

    for gas

  • Flow rate:

    Max.: 250 l/min (66 us gal/min)

    Min.: 100 l/min (26 us gal/min)

  • Pressure:

    150 psi

Description

The IE250A mass flow controller is elastomer-sealed, multi-gas/multi-range MFC designed for use in harsh industrial environments where resistance to liquid and dust ingress are essential.

The IE250A can be ranged from 100 to 250 slm (N2 equivalent). The IE250 is available with either analog I/O or digital I/O utilizing the latest control algorithms for fast and repeatable response to set point.

Settling times of 1 to 2 seconds and setpoint accuracy below 1% of setpoint exceeds typical high flow mass flow controllers. Precise control is maintained down to 2% of the IE250A's configured Full Scale flow range. Multi-gas/multi-range capability and tight performance specifications for accuracy, control range, and transient response minimize flow controller inventory requirements.