thermal mass flow controller / for gas
Min.: 100 l/min (26 us gal/min)
Max.: 250 l/min (66 us gal/min)
The MKS IM250 Multi-gas, Multi-range, IP66-rated, Metal-sealed, Digital Mass Flow Controller for Flow Rates up to 250 slm is designed for use in harsh environments where resistance to liquid or dust ingress are essential.
The IM250 can be ranged from 100 to 250 slm Nitrogen Full Scale flow. This broad range is enabled by the IM250's unique control valve design, which provides rapid setpoint response while maintaining closed conductance leak rates - well below other typical high-flow MFCs.
The IM250 fast settling time (< 2 seconds) and 1% of setpoint accuracy exceeds other typical high flow MFCs. Precise control is maintained down to 2% of the IM250 MFCs configured full scale. IM250 performance, combined with the multi-gas/multi-range capability, minimizes high flow mass flow controller inventories.