thermal mass flow controller / for gas
IE500A MKS Instruments

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thermal mass flow controller / for gas thermal mass flow controller / for gas - IE500A
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Characteristics

  • Technology:

    thermal mass

  • Fluid:

    for gas

  • Flow rate:

    Max.: 500 l/min (132 us gal/min)

    Min.: 250 l/min (66 us gal/min)

  • Pressure:

    150 psi

Description

The IE500A mass flow controller is elastomer-sealed, multi-gas/multi-range MFC designed for use in harsh industrial environments where resistance to liquid and dust ingress are essential.

The IE500A can be ranged from 250 slm to 500 slm (N2 equivalent). This broad flow range is enabled by the unique control valve design, which responds rapidly to setpoint changes while maintaining closed conductance leak rates that are well below other high flow mass flow controllers.

Settling times of 2 to 3 seconds and setpoint accuracy below 1% of setpoint exceeds typical high flow mass flow controllers. Precise control is maintained down to 2% of the IE500A's configured Full Scale flow range. Multi-gas/multi-range capability and tight performance specifications for accuracy, control range, and transient response minimize flow controller inventory requirements.