thermal mass flow controller / for gas
Min.: 30 l/h (8 us gal/h)
Max.: 600 l/h (159 us gal/h)
200 Torr (4 psi)
DELTA™ II Flow Ratio Controller is a critical process control instrument in the MKS line of digital control, web-enabled products providing the latest in gas flow ratio measurement and control technology necessary to meet the demands of multi-channel flow distribution. It divides and controls mixed process gas flows to either multiple chambers or zones within a process chamber at ratios specified by the user maximizing process uniformity and repeatability. Send DELTA™ II a gas - or any mixture - and a ratio set point and it will split the gas into two separate output channels automatically and precisely.
FEATURES & BENEFITS:
Embedded Ethernet for device monitoring during operation
Uses standard web browser - no special software required.
Patented control algorithm for faster response-to-ratio setpoint
Wider dynamic control range for ratio control down to 5% of flow channel full scale flow
Bright LED display for easy viewing of flow ratio, temperature and Ethernet address