thermal mass flow controller / for gas
DELTA™ II MKS Instruments

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Characteristics

  • Technology:

    thermal mass

  • Fluid:

    for gas

  • Flow rate:

    Min.: 30 l/h (8 us gal/h)

    Max.: 600 l/h (159 us gal/h)

  • Pressure:

    200 Torr (4 psi)

Description

DELTA™ II Flow Ratio Controller is a critical process control instrument in the MKS line of digital control, web-enabled products providing the latest in gas flow ratio measurement and control technology necessary to meet the demands of multi-channel flow distribution. It divides and controls mixed process gas flows to either multiple chambers or zones within a process chamber at ratios specified by the user maximizing process uniformity and repeatability. Send DELTA™ II a gas - or any mixture - and a ratio set point and it will split the gas into two separate output channels automatically and precisely.

FEATURES & BENEFITS:

Embedded Ethernet for device monitoring during operation
Uses standard web browser - no special software required.
Patented control algorithm for faster response-to-ratio setpoint
Wider dynamic control range for ratio control down to 5% of flow channel full scale flow
Bright LED display for easy viewing of flow ratio, temperature and Ethernet address