process gas analyzer / water / gas / trace
process gas, water, gas
The multi-gas analyzer, manufactured by MKS Intruments, is especially used for process gas. The device uses a fourier transform infrared (FTIR) and a nondispersive infrared (NDIR). The device is also capable of ppb to ppm sensitivity for gases such as NF3, NH3, H2, NO and N2O. It can also be used on gases with 30% water.