mass spectrometer / process / PMT
RGA MKS Instruments

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mass spectrometer / process / PMT mass spectrometer / process / PMT - RGA
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Characteristics

  • Type:

    mass

  • Field:

    process

  • Other characteristics:

    PMT

Description

The RGA series, manufactured by MKS Instruments, is a type of process mass spectrometer. The device is an innovative process monitoring instrument. They are combined with application packages such as residual gas analyzers, RGA's, analytical devices and control software.

The vacuum monitoring consist of Ultra High Vacuum, CVD Processes, Vacuum Baseline RGA, etc.