gas delivery system
MKS Instruments

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Characteristics

  • Applications:

    gas

Description

This is a gas delivery system manufactured by MKS Instruments which is designed for delivering gas, liquid, or soluble solid material at a well controlled environment. For specific materials such as vaporized materials, it prevents material decomposition. For this specific unit, it follows a certain fundamental gas measurement principle which has a specific control valves. Also, it uses a new digital control and Ethernet communication designed for optimum performance.

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