Thermal mass flow controller P2 MFC
for sour gasdigital

thermal mass flow controller
thermal mass flow controller
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Characteristics

Technology
thermal mass
Fluid
for sour gas
Other characteristics
digital
Flow rate

Min.: 0 l/h
(0 us gal/h)

Max.: 1 l/h
(0.26417 us gal/h)

Pressure

Min.: 4 Torr
(0 psi)

Max.: 1,200 Torr
(23 psi)

Description

The PFC-60 ΠMFC, manufactured by MKS Instruments, is a digital thermal mass flow controller especially used for corrosive gases. The device consist of improvement in the technology in terms of functionality and performance. They help the users in semiconductor and high purity thin-film applications. The flow control of the device is insensitive to upstream and downstream disturbances. The real-time control of the gas flow and its accuracy is improved. They have better chamber matching than PID based digital MFCs. The pressure sensor and LED display is combined in order to lessen the components needed in a gas stick. The set-up and troubleshooting of the MFC's in-situ is due to the web based browser interface.

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Exhibitions

Meet this supplier at the following exhibition(s):

ACHEMA 2024
ACHEMA 2024

10-14 Jun 2024 Frankfurt am Main (Germany)

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    *Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.