Ventilation grill / diffuser
450 °C
Mott Corporation
The chamber is a contaminated environment, and pressurization can disturb the particles contained within, causing them to fall on the wafer's surface. The challenge is to pressurize as quickly as possible, but without creating jets of gas that can disturb particles.
The solution: Mott GasShield® POU (Point-of-Use) Diffusers.
Mott porous metal can greatly reduce "vent" time of the load lock without the adverse "jet" effect seen through showerheads and simple 1/4" inlet lines. The porous metal reduces the velocity of the purge gas to ensure a uniform and laminar flow of gas into the chamber.
