Miniature pressure sensor
MSI Sensors

The MS7201-A2 is an absolute silicon micro-machined pressure sensor for harsh environment, with the pads on one side. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a glass cap. The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane. To improve the sensor stability, a drilled glass is bonded on the backside. As the pressure port consists of glass and silicon, both stable in most of the chemicals, the MS7201-A2 is suitable for media-resistive applications.

Features:

- Media resistive pressure sensor die
- Typical output Span 110mV @ 5V
- Temperature range -40°C to +150°C
- Linearity 0.15% (typical)
- Die size 1.35 x 1.79mm²
- Low cost, high reliability & stability