articulated robot / 6-axis / for clean rooms
Number of axes:
for clean rooms
Flexible transfer with its 6 axes structure.
Picking up vertically, rotation, and any other transfer is
Powerful pay load with Large envelope.
Enough arm length and envelope to transfer the 10th
glass substrate Max. reach 3.6m, Up/Down envelope
Maximum pay load up to 210 kg, perfect for handling large
Faster with improved rigidity reduces cycle times and
minimizes flexure and vibration.
Clean room compatible
ISO class 6 clean room compatibility for operating in clean
Teaching pendent with large LCD has color graphics that
simplify and clarify operations to greatly reduce Robot
SJ80C-18D/24D, SJ120C-28D/28S :
Largesized glass substrate transfer robot
Perfect for horizontal transfer of 7th generation
(SJ80C) through 9th generation (SJ120C) and other
various-sized glass substrates.
Fastest motion in its class
Rotation speed: Maximum 180* /sec
Up and down speed: Maximum 1,050 mm/sec
Unique linkage structure applied to up and down
High-rigidity structure for minimizing flexure and
Be It-less structure ensures high reliability and safety
Moving cables are completely enclosed in the arm
The enclosed design prevents particle generation and
looks good too