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NanoFocus
 

3D optical measuring device for cutting-edges
µsurf blade NanoFocus

The µsurf blade was developed for the measurement and evaluation of cutting-edge geometries, foils or membranes up to a total thickness of 0.8 mm. The special configuration of two measurement systems achieves nanometer precision resolution.

Both sides of the sample are measured independently and are integrated in a 3D overall image from which the absolute thickness profile is determined. The fully-automated calibration of the system produces reliable measurement results.
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standListOtherProduct www di En 2012-06-22-01