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High vacuum piezo motor NanomotionNanomotion series of Vacuum motors provide the perfect motion solution to an unlimited range of applications, including E-Beam writers, SEM, TEM, or any application that requires a vacuum and/or E-beam or Ion beam environment.
3 series of vacuum motors are offered: Vacuum motors- Compatible with up to 10-7 Torr Vacuum non magnetic motors - High vacuum motors, fabricated without ferrous materials, generating no magnetic field and no EMI. Ultra high vacuum motors - Nanomotion ultra high vacuum motors are compatible with 10-10 Torr environments, and are offered at configurations of 4N, 8N, 16N, and 32 N of force. |



