High vacuum piezo motor New Scale TechnologiesThe SQ-100UHV Series motor operates at 10-10 Torr for automated ultrahigh vacuum alignment without mechanical feed-throughs.
These miniature motors offer:
- Small size for tight spaces
- High resolution (20 nm)
- Long travel (to 50 mm)
- Fast, quiet and smooth motion
- Off-power position hold for multi-axis
- "set and hold" positioning
- Ultra-low outgassing and heating in vacuum
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