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piezoelectric motor

High vacuum piezo motor

The SQ-100UHV Series motor operates at 10-10 Torr for automated ultrahigh vacuum alignment without mechanical feed-throughs. These miniature motors offer: - Small size for tight spaces - High resolution (20 nm) - Long travel (to 50 mm) - Fast, quiet and smooth motion - Off-power position hold for multi-axis - "set and hold" positioning - Ultra-low outgassing and heating in vacuum

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