Piezoelectric micro-motor
20 nm, 5 N | SQ-100
New Scale Technologies
SQUIGGLE Micro Motors for Lab & Research
Piezo motors for research, test and manufacturing
The SQ-100 Series SQUIGGLE motor is a patented piezoelectric motor for nanopositioning in the research lab, in semiconductor testing, and in manufacturing. SQ-100 Series micro motors offers higher resolution and push force than the smaller SQL Series motors, and have travel ranges to 50 mm.
These miniature motors offer:
- Small size for tight spaces
- High resolution (20 nm)
- Long travel (to 50 mm)
- Fast, quiet and smooth motion
- Self-locking for "set and hold" positioning
- Vacuum and ultrahigh vacuum versions available with ultra-low outgassing and heating
- Non-magnetic version available
The SQ-100 motor drives axial loads of greater than 5 Newtons with 20 nm resolution. Like all SQUIGGLE motors, it generates no magnetic fields in operation and holds position with the power off. The SQ-100V is a vacuum motor operating to 10-7 Torr for in-vacuum alignment without mechanical feed-throughs.
We also offer custom ultrahigh vacuum motors for operation down to to 10-10 Torr, as well as custom non-magnetic motors.
You can use the SQ-100 and SQ-100V to directly replace the manual micrometer in many commercial linear stages (a light spring pre-load is required). See also our ultra-thin motorized positioning stage with integral piezo motor and encoder inside.
