Air bearing
Newport / Spectra-Physics
The unique hybrid architecture of HybrYX offers the following outstanding performance characteristics for demanding scanning applications:
Z-Jitter & dynamic straightness of less than ±25nm during high speed motion
- Better than 0.1% velocity ripple
- Compact 1200mm by 765mm footprint with 650mm by 350mm travel range
- Long-life & high MTBF as air bearing is not limited by bearing travel/life- expectancy
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