Air bearing
Newport / Spectra-Physics

The all-new HybrYXTM single plane XY hybrid stages are the latest addition to Newport's air bearing products offering the advantages of a single plane air bearing stage at a much lower cost than previously possible. HybrYX is well suited for semiconductor wafer inspection systems as well as being an excellent choice for use in large substrate (flat panel display and photovoltaic panel) inspection and processing tools.

The unique hybrid architecture of HybrYX® offers the following outstanding performance characteristics for demanding scanning applications:
- Z-Jitter & dynamic straightness of less than ±25nm during high speed motion
- Better than 0.1% velocity ripple
- Compact 1200mm by 765mm footprint with 650mm by 350mm travel range
- Long-life & high MTBF as air bearing is not limited by bearing travel/life- expectancy