Wafer inspection machine
P3
Nikon Metrology
Advanced, versatile semiconductor inspection and wafer management systems
Manufacturing equipment from steppers to the most sophisticated inspection systems has given Nikon invaluable experience in the field of microelectronics. This experience has allowed Nikon to become a worldwide leader in microelectronics technology and in the manufacture of advanced instruments designed specifically for the inspection of semiconductors and flat panel displays.
* Automatic AMI-3000 and 2000 macro inspection systems feature high
throughput and exceptional sensitivity
* P3 lithography inspection platform designed to improve product yield by
capturing yield-limiting defects
* Optistation 3200, 3100, 3000, 7 and V series of 300mm wafer inspection systems
* NEXIV FOUP series of non-contact, fully automated wafer carrier measuring systems
* Eclipse series of semiconductor microscopes and NWL series of advanced IC
inspection wafer loaders
Features:
* Advanced and versatile semiconductor inspection systems
* Built for factory automation and contamination-free inspection
* Laser autofocus and CFI optics achieve new levels of brightness, sharpness, contrast and operability
* Integrated graphical software for wafer inspection and review
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