Wafer inspection machine
P3
Nikon Metrology
Semiconductor inspection systems: AMI, Optistation and Nexiv
Advanced, versatile semiconductor inspection and wafer management systems
Manufacturing equipment from steppers to the most sophisticated inspection systems has given Nikon invaluable experience in the field of microelectronics. This experience has allowed Nikon to become a worldwide leader in microelectronics technology and in the manufacture of advanced instruments designed specifically for the inspection of semiconductors and flat panel displays.
Automatic AMI-3000 and 2000 macro inspection systems feature high
throughput and exceptional sensitivity
P3 lithography inspection platform designed to improve product yield by
capturing yield-limiting defects
Optistation 3200, 3100, 3000, 7 and V series of 300mm wafer inspection systems
NEXIV FOUP series of non-contact, fully automated wafer carrier measuring systems
Eclipse series of semiconductor microscopes and NWL series of advanced IC
inspection wafer loaders
Features:
Advanced and versatile semiconductor inspection systems
Built for factory automation and contamination-free inspection
Laser autofocus and CFI optics achieve new levels of brightness, sharpness, contrast and operability
Integrated graphical software for wafer inspection and review
Advanced, versatile semiconductor inspection and wafer management systems
Manufacturing equipment from steppers to the most sophisticated inspection systems has given Nikon invaluable experience in the field of microelectronics. This experience has allowed Nikon to become a worldwide leader in microelectronics technology and in the manufacture of advanced instruments designed specifically for the inspection of semiconductors and flat panel displays.
Automatic AMI-3000 and 2000 macro inspection systems feature high
throughput and exceptional sensitivity
P3 lithography inspection platform designed to improve product yield by
capturing yield-limiting defects
Optistation 3200, 3100, 3000, 7 and V series of 300mm wafer inspection systems
NEXIV FOUP series of non-contact, fully automated wafer carrier measuring systems
Eclipse series of semiconductor microscopes and NWL series of advanced IC
inspection wafer loaders
Features:
Advanced and versatile semiconductor inspection systems
Built for factory automation and contamination-free inspection
Laser autofocus and CFI optics achieve new levels of brightness, sharpness, contrast and operability
Integrated graphical software for wafer inspection and review
