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shut-off valve

Isolation valve


Since 1962, we have been improving our designs and expanding our product line in order to offer the vacuum industry stainless steel valves for almost every application. Our valves provide outstanding performance in the most demanding applications such as semiconductor and compound semiconductor processing.


General Specifications:
- Electropolished 304 stainless steel die-formed body
- 15 micron filter on air cylinder exhaust
- Full opening
- Viton® poppet O-ring, standard
- .38 to 4.0 inch port ODs
- Helium leak rate 10-9 std. cc./sec. or less
- Viton® Seal Bonnet: 10-9 Torr vacuum rating, Bakeable to 204°C intermittent, CF, NW, ISO and ASA flanges
- Copper Seal Bonnet: 10-10 Torr vacuum rating, CF flanges, bakeable to 204°C intermittent
- Pneumatically Operated: Normally closed, 60 to 80 psig operating air pressure
- Maximum differential pressure 20 psi across valve seat
- External differential presures greater than 5 psi on the bellows may result in premature bellows failure


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