Thin film deposition controller for semiconductor and vacuum coating process
150 °C
Nor-Cal Products
Our coating instrumentation products support one of the more popular methods of thin film measurement and rate control _ the crystal monitor, which utilizes the piezoelectric properties of a quartz crystal.
The electrical characteristics of the crystal, which is held in place by the sensor, change during deposition. Single sensors are generally used for short deposition runs, whereas, dual sensors allow for longer runs. Dual sensors require an airline to operate a pneumatic shutter which covers one crystal at a time. The sensor is either welded to the feedthrough or attached with connectors. Most sensors are available with cooling lines.
The application determines the correct choice of sensor. The sensor determines compatible feedthroughs and cabling. The chamber determines the appropriate feedthrough and flange. For application temps up to 150°C, electrical connection between the sensor and feedthrough is accomplished with a vacuum coaxial cable. A bakeable, one piece sensor/feedthrough replaces the standard in-vac cable with a stainless steel high-temp coaxial line for high temperature applications up to 300°C.
